JPH0217834U - - Google Patents

Info

Publication number

JPH0217834U

JPH0217834U JP9637788U JP9637788U JPH0217834U JP H0217834 U JPH0217834 U JP H0217834U JP 9637788 U JP9637788 U JP 9637788U JP 9637788 U JP9637788 U JP 9637788U JP H0217834 U JPH0217834 U JP H0217834U

Authority

JP

Japan

Prior art keywords

shaft body

hole

semiconductor substrate

fixed plate

space

Prior art date

1988-07-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005498 polishing Methods 0.000 claims description 16
• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000000758 substrate Substances 0.000 claims description 6
• 230000000149 penetrating effect Effects 0.000 claims 1
• 238000000034 method Methods 0.000 description 4
• 239000003795 chemical substances by application Substances 0.000 description 2
• 239000007788 liquid Substances 0.000 description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
• QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 1